Beilstein J. Nanotechnol.2022,13, 10–53, doi:10.3762/bjnano.13.2
, Czech Republic 10.3762/bjnano.13.2 Abstract Sputter deposition of atoms onto liquid substrates aims at producing colloidal dispersions of small monodisperse ultrapure nanoparticles (NPs). Since sputteringontoliquids combines the advantages of the physical vapor deposition technique and classical
overview of the properties and applications of the produced NPs.
Keywords: low-pressure plasmas; magnetron; nanoparticles; nanoparticle formation; sputtering; sputteringontoliquids; Introduction
According to the general terminology, nanoparticles (NPs) are objects that have a size of less than 100 nm
in the production chain that might cause detrimental issues, for example, NP aggregation. In this respect, low-pressure plasma-based sputteringontoliquids (SoL) is a relatively new synthetic approach in which the purification step can be avoided. This technique is based on the sputtering of
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Figure 1:
Growth of research interest in the SoL approach. Insert: Number of SoL-related publications in the ...